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http://www.scientific.net/0-87849-963-6/681/
11. An in-situ post growth annealing process for the improvement of 4H-SiC/
SiO2 MOS interface prepared by CVD using TEOS, and its characteristic study
Ramanujam K, Furuichi H, Taguchi K, Yukumoto S, Nishino S : SILICON
CARBIDE AND RELATED MATERIALS 2004 Book Series: MATERIALS SCIENCE FORUM
Volume: 483 Pages: 681-684 Published: 2005 |
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